An earthquake with a preliminary magnitude of 6 struck southern Taiwan early Tuesday, according to the U.S. Geological Survey, leaving 15 people with minor injuries.

Taiwan experienced a 6.4 magnitude earthquake on Tuesday. The quake struck near the city of Chiayi in Taiwan’s south, according to Reuters, and it shook buildings in Taipei. TSMC said it evacuated personnel from some buildings and the science park in Tainan,

In a statement to DCD, TSMC said that as a result of the earthquake, its fabs in Taiwan’s Southern Science Park recorded a maximum seismic intensity of level 5, while fabs in Central Science Park recorded a maximum intensity of level 4 and Hsinchu Science Park fabs (including Longtan and Zhunan) recorded a maximum intensity of level 3.